FORMATION OF AN ION-CLUSTER BEAM FOR MATERIAL PROCESSING
Nikolay G. Korobeishchikov, Alexandr E. Zarvin, Valery V. Kalyada, Mikhail D. Khodakov
Страницы: 115-123
Опубликовано: 1 Jan 2012
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Аннотация: In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.
Ключевые слова: supersonic jet, gas cluster, molecular beam, ionization, cluster ion, surface processing
Цитировать эту статью: Nikolay G. Korobeishchikov, Alexandr E. Zarvin, Valery V. Kalyada, Mikhail D. Khodakov. FORMATION OF AN ION-CLUSTER BEAM FOR MATERIAL PROCESSING. Journal of International Scientific Publications: Materials, Methods & Technologies 6, 115-123 (2012). https://www.scientific-publications.net/en/article/1003198/
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