EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS
Oksana V. Shiman
Strony: 124-128
Opublikowano: 1 Jan 2012
Wyświetlenia: 243 Pobrania: 23
Streszczenie: The selective wet-etching of laser and electron beam irradiated Sb-Se thin films was performed. The irradiation effects of the radiation from an excimer laser on Sb-Se thin films are compared with those from electron beam studies. Both types of irradiation were found to induce changes in the structure of Sb-Se thin film. Characterization of the structure and surface of studied films by AFM methods has been done and potential application is suggested. We have realized direct, one-step e-beam recording of surface reliefs. An experimental study of the possibility to fabricate grey scale optical elements and 3D structures in resist was carried out.
Słowa kluczowe: laser, electron beam, thin film, irradiation, relief
Cytowanie artykułu: Oksana V. Shiman. EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS. Journal of International Scientific Publications: Materials, Methods & Technologies 6, 124-128 (2012). https://www.scientific-publications.net/en/article/1003199/
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