EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS
Oksana V. Shiman
Pagini: 124-128
Publicat: 1 Jan 2012
Vizualizări: 244 Descărcări: 23
Rezumat: The selective wet-etching of laser and electron beam irradiated Sb-Se thin films was performed. The irradiation effects of the radiation from an excimer laser on Sb-Se thin films are compared with those from electron beam studies. Both types of irradiation were found to induce changes in the structure of Sb-Se thin film. Characterization of the structure and surface of studied films by AFM methods has been done and potential application is suggested. We have realized direct, one-step e-beam recording of surface reliefs. An experimental study of the possibility to fabricate grey scale optical elements and 3D structures in resist was carried out.
Cuvinte cheie: laser, electron beam, thin film, irradiation, relief
Citează acest articol: Oksana V. Shiman. EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS. Journal of International Scientific Publications: Materials, Methods & Technologies 6, 124-128 (2012). https://www.scientific-publications.net/en/article/1003199/
Disclaimer: The Publisher and/or the editor(s) are not responsible for the statements, opinions, and data contained in any published works. These are solely the views of the individual author(s) and contributor(s). The Publisher and/or the editor(s) disclaim any liability for injury to individuals or property arising from the ideas, methods, instructions, or products mentioned in the content.
Submit Feedback
We value your input! Use this form to report any concerns or provide feedback on our published articles. All submissions will be kept confidential.
