EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS

Oksana V. Shiman

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Materials, Methods & Technologies 2026, 28th International Conference

13-16 August, Burgas, Bulgaria

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Materials, Methods & Technologies, Volume 6, 2012

EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS

Oksana V. Shiman

Pages: 124-128
Published: 1 Jan 2012
Views: 369
Downloads: 29

Abstract: The selective wet-etching of laser and electron beam irradiated Sb-Se thin films was performed. The irradiation effects of the radiation from an excimer laser on Sb-Se thin films are compared with those from electron beam studies. Both types of irradiation were found to induce changes in the structure of Sb-Se thin film. Characterization of the structure and surface of studied films by AFM methods has been done and potential application is suggested. We have realized direct, one-step e-beam recording of surface reliefs. An experimental study of the possibility to fabricate grey scale optical elements and 3D structures in resist was carried out.

Keywords: laser, electron beam, thin film, irradiation, relief

Cite this article: Oksana V. Shiman. EXCIMER LASER AND ELECTRON BEAM IRRADIATION EFFECTS IN SB 40SE 60 THIN FILMS. Journal of International Scientific Publications: Materials, Methods & Technologies 6, 124-128 (2012). https://www.scientific-publications.net/en/article/1003199/

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